Solution Cases [case-016] Low cost large bore vertical furnace

  • Curing (for FPD)
  • VFS-4000

Cost reduction of large bore vertical furnace by optimizing required functions

Support Process Polyimide curing (F-OLED)
Model Introduced VFS-4000


  • VFS-4000 is a semiconductor-specification large bore vertical furnace capable of high-quality heat treatment.
  • However, when used for baking flexible OLED substrates, the equipment price will be higher than the market value.


  • Adoption of prefabricated structure chamber using heat-resistant glass
  • Thorough value analysis and structural change of the entire equipment such as glass base plate storage rack, lifting mechanism, exhaust pressure control method, etc


  • High quality heat treatment has become possible at a reasonable equipment price.