Model 206A Horizontal Furnace for PV Production

This horizontal furnace is suitable for solar battery and photovoltaic (PV) cell production. 100 to 156 square wafers can be mass-processed in a batch of 200 to 400 wafers each.

Features

  • No. 1 share in domestic market
  • Handles 100- to 200-mm square wafers
  • Batch: 200 to 400 wafers processing is available (depends on flat zone length and wafer pitch)
  • Fast heating up and cooling down, reduced power using KTS’ exclusive LGO heater

Overview

This solar battery and photovoltaic (PV) cell manufacturing horizontal furnace processes 125-mm square and 156-mm square photovoltaic cells and 6- and 8-inch wafers. The optimal furnace for solar battery and photovoltaic (PV) cell production, it can perform phosphorus diffusion, boron diffusion, pyrogenic oxidation, wet oxidation, dry oxidation, annealing and other crystal system thermal processing using POCl3, BBr3 and other materials.

Specifications

Outer dimension (mm) W850 x L6700 x H2500 mm (three-stage furnace)
Heater LGO heater
Flat zone length 1000 mm
Temp. control 3 to 5 Zone
Transfer equipment Boat loader
Manufactured article 3 to 8 inch silicon wafer
125 to 156 mm square wafer

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