High-Temperature Inert Gas Oven INH Series

With this series, a high maximum operating temperature of 600℃ is available, together with a nitrogen (N2) atmosphere that yields low oxygen (O2) concentration of 20 ppm.

These products have been delivered in large quantities for degreasing of ceramic parts (*) and various anti-oxidation treatments.

The furnace external cooling mechanism using cooling blowers shortens the cooling time without affecting the atmosphere inside the furnace.

* Separate safety equipment is required. Please contact us from General Inquiries.
It is recommended that these products be used in combination with heater-type exhaust gas treatment equipment.

Features

  • Based on our extensive record of success, this series enables a temperature of 600°C—the highest temperature for any anti-oxidation treatment equipment.
  • N2 purge enables residual oxygen concentrations of 20 ppm or less.
  • An external cooling system that uses cooling blowers shortens the cooling time.
  • The oil seal and silicon seal maintain high airtightness and a water-cooling mechanism protects the seals from heat.
  • Successfully used for a wide range of production including glass substrates and ceramic degreasing (*).

Specifications

Model INH-9N1 INH-21CD INH-51N2 INH-100N2
System Forced circulation (side flow)
Max. operating temperature (*1) 600°C
Normal operating temperature range (*1) RT +60 to 600°C
Temperature profile accuracy (*2) ±8°C (at 600°C), ±5°C (at 350°C)
Final oxygen concentration 20 ppm or less
Time to reach max. temperature
(Reference value) (*1)
120 minutes or less
(RT +60 to 600°C)
90 minutes or less
(RT +60 to 600°C)
90 minutes or less
(RT +60 to 600°C)
Time to reach 20 ppm 50 minutes or less
(N2 injection 50 L/min)
60 minutes or less
(N2 injection 250 L/min) injection 90 L/min)
90 minutes or less
(N2 injection 250 L/min) injection 150 L/min)
90 minutes or less
(N2 injection 250 L/min) injection 250 L/min)
Temperature control Programmer Touch panel installed on program controller
Reading accuracy Less than 500°C: ±0.5°C ±0.3% FS±1 digit
500°C or higher: ±(0.1% of displayed value) Sampling frequency: 500 ms
Memory capacity Total 1024 segments (max. 99 patterns) 30 segments/program
Control operation PID control with auto tuning
Cooling mechanism External forced cooling mechanism
Heater output 7.5 kW (at 200 V) 12.0 kW (at 200 V) 25.3 kW (at 200 V) 44.3 kW (at 200 V)
Internal pressure gauge 0 to 2 kPa
Thermocouple K
External dimensions (mm) 1105 (W) × 1650 (H) × 840 (D) 1255 (W) × 1800 (H) × 1120 (D) 1606 (W) × 1991 (H) × 1300 (D) 1806 (W) × 2210 (H) × 2060 (D)
Internal dimensions (mm) 450 (W) × 450 (H) × 450 (D) 600 (W) × 600 (H) × 600 (D) 800 (W) × 800 (H) × 800 (D) 1000 (W) × 1000 (H) × 1000 (D)
Exhaust port size 1B, ball valve stopper 1.5B, ball valve stopper
Breaker capacity AC 200 V, 30 A
3-phase, 50/60 Hz
AC 200 V, 50 A
3-phase, 50/60 Hz
AC 200 V, 175 A
3-phase, 50/60 Hz
AC 200 V, 180 A
3-phase, 50/60 Hz
Shelf withstand load (uniformly distributed load) 15 kg/shelf
Safety equipment Leakage breaker, overheat prevention gauge, motor overload protector, control circuit protector
Accessories 2 shelves (shelf holder), temperature recorder 2 shelves (shelf holder),
temperature recorder function (built into control system)
Temperature recorder function
(built into control system)
Applications Annealing of electronic components, annealing of mounted substrates, debinding of MLCC and LTCC (*3), debinding of inductors (*3), degreasing of ceramics (*3), annealing of glass substrates, others
(*1) Indicates the value at control points inside the heating chamber.
(*2) Effective dimensions INH-9, INH-21: 2/3 of internal dimensions; INH-51, INH-100: 4/5 of internal dimensions
(*3) Separate safety equipment is required. Please contact us from (link to Inquiries page).
☆ A coolant is required to protect the seal packing.

☆ The thermocouple is a consumable part.