We manufacture leading-edge heat treatment systems for producing power semiconductors,
silicon and compound semiconductors, solar batteries, organic EL (OLED), polyimide and
MEMS. Our product lineup covers heat treatments from a low-temperature range to 1850°C
Designs may be customized to suit customers’ needs.
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CNT(Carbon nanotube) growth system for large diameter wafers
Improving experimental and development accuracy with a high-performance small-scale vertical furnace for experiments
Improvement of vertical furnace to energy saving by optimizing thermal insulation design
On display at SEMICON Japan Virtual
Sales and patent information have been updated to the website.