We manufacture leading-edge heat treatment systems for producing power semiconductors,
silicon and compound semiconductors, solar batteries, organic EL (OLED), polyimide and
MEMS. Our product lineup covers heat treatments from a low-temperature range to 1850°C
Designs may be customized to suit customers’ needs.
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Technologies/Solutions
With the technology and know-how that we have cultivated over many years of developing semiconductor heat treatment systems, we assist customers in solving any problems they may have. The following introduces some examples of our solutions and equipment for demonstration.
Advantages of Koyo Thermo Systems
As an expert in semiconductor heat treatment systems, our company has been contributing to the development of the semiconductor industry over the past half century from 1970 until now. The following introduces our history of product development and our strengths as a company.
See various customer problems and their solutions.
CNT(Carbon nanotube) growth system for large diameter wafers
Improving experimental and development accuracy with a high-performance small-scale vertical furnace for experiments
Improvement of vertical furnace to energy saving by optimizing thermal insulation design
On display at SEMICON Japan Virtual
Sales and patent information have been updated to the website.
