We manufacture leading-edge heat treatment systems for producing power semiconductors,
silicon and compound semiconductors, solar batteries, organic EL (OLED), polyimide and
MEMS. Our product lineup covers heat treatments from a low-temperature range to 1850°C
Designs may be customized to suit customers’ needs.
On display at SEMICON Japan 2018
On display at SSDM 2018
Two cases have been added to the Solution Cases.
On display at JASIS 2018 (Japan Analytical & Scientific Instruments Show)
Solution Cases and FAQ sections have been added to the website.