We manufacture leading-edge heat treatment systems for producing power semiconductors,
silicon and compound semiconductors, solar batteries, organic EL (OLED), polyimide and
MEMS. Our product lineup covers heat treatments from a low-temperature range to 1850°C
Designs may be customized to suit customers’ needs.
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See various customer problems and their solutions.
CNT(Carbon nanotube) growth system for large diameter wafers
Improving experimental and development accuracy with a high-performance small-scale vertical furnace for experiments
Improvement of vertical furnace to energy saving by optimizing thermal insulation design
One case has been added to the Solution Cases. ([case-019] Reduction of wafer transfer errors)
On display at SEMICON Japan Virtual